AN AUTOMATIC MODE MATCHING SYSTEM FOR A HIGH Q-FACTOR MEMS GYROSCOPE USING A DECOUPLED PERTURBATION SIGNAL

Yesil F., Alper S. E., Akin T.

18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Alaska, United States Of America, 21 - 25 June 2015, pp.1148-1151 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/transducers.2015.7181131
  • City: Alaska
  • Country: United States Of America
  • Page Numbers: pp.1148-1151
  • Keywords: MEMS gyroscope, in-run mode-matching, perturbation signal based mode-matching
  • Middle East Technical University Affiliated: Yes

Abstract

This paper reports a closed-loop controller system developed for in-run automatic matching of the drive and sense mode resonance frequencies of a MEMS gyroscope with a high quality factor (Q). This is achieved by injecting a perturbation signal to the quadrature cancellation loop, while keeping it decoupled from the angular rate control loop. The new controller is implemented in a CMOS ASIC together with the other sensor control loops, and it is verified to maintain matched-mode state under changing environmental conditions. The system reduces the overall output noise of the tested MEMS gyroscope by a factor of 6; truly reaching down to the thermo-mechanical noise floor of 0.4 (degrees/hr)/Hz(1/2).