Physical Stability Analysis for Optical MEMS Phase Shifters

Ozer Y., KOCAMAN S.

31st Annual IEEE Photonics Conference (IPC) of the IEEE-Photonics-Society, Preston, United Kingdom, 30 September - 04 October 2018 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: Preston
  • Country: United Kingdom
  • Middle East Technical University Affiliated: Yes

Abstract

Stability and switching performance of light force driven opto-mechanical phase shifters are examined and a formula determining the stability condition has been proposed for various structures. The analysis showed that cantilever beams are inadequate to generate 180 phase difference.