Physical Stability Analysis for Optical MEMS Phase Shifters


Ozer Y., KOCAMAN S.

31st Annual IEEE Photonics Conference (IPC) of the IEEE-Photonics-Society, Preston, İngiltere, 30 Eylül - 04 Ekim 2018 identifier identifier

  • Basıldığı Şehir: Preston
  • Basıldığı Ülke: İngiltere

Özet

Stability and switching performance of light force driven opto-mechanical phase shifters are examined and a formula determining the stability condition has been proposed for various structures. The analysis showed that cantilever beams are inadequate to generate 180 phase difference.