Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process


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Ramzan M., Khan T. M., Bolat S., NEBİOĞLU M. A., ALTAN H., Okyay A. K., ...Daha Fazla

JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES, cilt.38, sa.8, ss.945-957, 2017 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 38 Sayı: 8
  • Basım Tarihi: 2017
  • Doi Numarası: 10.1007/s10762-017-0397-7
  • Dergi Adı: JOURNAL OF INFRARED MILLIMETER AND TERAHERTZ WAVES
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.945-957
  • Anahtar Kelimeler: Frequency selective surfaces, Bandpass filters, Periodic structures, Metamaterials, Microfabrication, HF etching, Pyrex glass, Terahertz, TECHNOLOGY
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

This paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-mu m-thick glass substrate is formed through the HF etching of a standard 500-mu m-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-mu m-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30A degrees angle of incidence. The second design consists of a tripole structure on top of a 100-mu m-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30A degrees angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-mu m-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20A degrees angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-mu m-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations.