A 160×120 LWIR-band CMOS infrared (CIR) microbolometer

Tankut F., Cologlu M. H. , Ozturk H., Cilbir G., Akar O. S. , Akin T.

Infrared Technology and Applications XLV 2019, Maryland, United States Of America, 14 - 18 April 2019, vol.11002 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 11002
  • Doi Number: 10.1117/12.2521484
  • City: Maryland
  • Country: United States Of America
  • Keywords: Microbolometer, low-cost thermal imaging, uncooled thermal imaging, CMOS Infrared (CIR) Technology, MEMS, LWIR, thermal cameras, readout integrated circuit (ROIC)