A 160×120 LWIR-band CMOS infrared (CIR) microbolometer


Tankut F., Cologlu M. H., Ozturk H., Cilbir G., Akar O. S., Akin T.

Infrared Technology and Applications XLV 2019, Maryland, United States Of America, 14 - 18 April 2019, vol.11002 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 11002
  • Doi Number: 10.1117/12.2521484
  • City: Maryland
  • Country: United States Of America
  • Keywords: Microbolometer, low-cost thermal imaging, uncooled thermal imaging, CMOS Infrared (CIR) Technology, MEMS, LWIR, thermal cameras, readout integrated circuit (ROIC)
  • Middle East Technical University Affiliated: Yes