SIMULTANEOUS DETECTION OF LINEAR AND CORIOLIS ACCELERATIONS ON A MODE-MATCHED MEMS GYROSCOPE


Sonmezoglu S., Gavcar H. D. , AZGIN K. , Alper S. E. , AKIN T.

27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San-Francisco, Costa Rica, 26 - 30 January 2014, pp.32-35 identifier

  • Publication Type: Conference Paper / Full Text
  • City: San-Francisco
  • Country: Costa Rica
  • Page Numbers: pp.32-35

Abstract

This paper presents a novel "in operation acceleration sensing and compensation method" for a single-mass mode-matched MEMS gyroscope. In this method, the amplitudes of the sustained residual quadrature signals on the differential sense-mode electrodes are compared to measure the linear acceleration acting on the sense-axis of the gyroscope. By measuring the acceleration acting along the sense-axis, the g-sensitivity of the gyroscope output to these accelerations is mitigated without using a dedicated accelerometer. It has been experimentally demonstrated that the g-sensitivity of the studied gyroscope is substantially reduced from 1.08 degrees/s/g to 0.04 degrees/s/g, and the effect of the linear acceleration on the gyroscope output is highly-suppressed (by 96%) with the use of the compensation method proposed in this work.