Copy For Citation
AKIN T.
National URSI Symposium Turkey, Antalya, Turkey, 6 - 08 September 2006, pp.11
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Publication Type:
Conference Paper
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Doi Number:
10.3390/s19040864
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City:
Antalya
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Country:
Turkey
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Page Numbers:
pp.11
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Keywords:
RF-MEMS, switch, capacitor, laterally movable triple electrodes, low voltage, fast response
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Middle East Technical University Affiliated:
Yes