Radio Frequency Micro Electro Mechanical Systems RF MEMS


AKIN T.

National URSI Symposium Turkey, Antalya, Turkey, 6 - 08 September 2006, pp.11 identifier identifier identifier

  • Publication Type: Conference Paper
  • Doi Number: 10.3390/s19040864
  • City: Antalya
  • Country: Turkey
  • Page Numbers: pp.11
  • Keywords: RF-MEMS, switch, capacitor, laterally movable triple electrodes, low voltage, fast response
  • Middle East Technical University Affiliated: Yes