THE INFLUENCE OF ANNEALING ON FLUORENE-TYPE THIN FILM PRODUCED BY BIPHENYL AND METHANE RF PLASMA SYSTEM

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Mansuroglu D., Bilikmen S.

IEEE International Conference on Plasma Sciences (ICOPS), Belek, Turkey, 24 - 28 May 2015

• Publication Type: Conference Paper / Summary Text
• City: Belek
• Country: Turkey
• Middle East Technical University Affiliated: Yes