THE INFLUENCE OF ANNEALING ON FLUORENE-TYPE THIN FILM PRODUCED BY BIPHENYL AND METHANE RF PLASMA SYSTEM

Mansuroglu D., Bilikmen S.

IEEE International Conference on Plasma Sciences (ICOPS), Belek, Turkey, 24 - 28 May 2015 identifier

  • Publication Type: Conference Paper / Summary Text
  • City: Belek
  • Country: Turkey
  • Middle East Technical University Affiliated: Yes