Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser


İDİKUT F. , KARAGÖZ B. , BEK A.

in: Advances in Optics: Reviews Book Series, Volume 5, Y. Yurish, Sergey, Editor, International Frequency Sensor Association (IFSA) Publishing, S. L., pp.473-484, 2021

  • Publication Type: Book Chapter / Chapter Vocational Book
  • Publication Date: 2021
  • Publisher: International Frequency Sensor Association (IFSA) Publishing, S. L.
  • Page Numbers: pp.473-484
  • Editors: Y. Yurish, Sergey, Editor