Sub-micron Direct Silicon Processing by Microsphere Focused Femtosecond Infrared Laser
in: Advances in Optics: Reviews Book Series, Volume 5, Y. Yurish, Sergey, Editor, International Frequency Sensor Association (IFSA) Publishing, S. L., pp.473-484, 2021
- Publication Type: Book Chapter / Chapter Vocational Book
- Publication Date: 2021
- Publisher: International Frequency Sensor Association (IFSA) Publishing, S. L.
- Page Numbers: pp.473-484
- Editors: Y. Yurish, Sergey, Editor
- Middle East Technical University Affiliated: Yes