A Multi-source Micro Power Generator Employing Thermal and Vibration Energy Harvesting

Toreyin H., Topal E., KÜLAH H.

24th Eurosensors International Conference, Linz, Austria, 5 - 08 September 2010, vol.5, pp.1176-1179 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 5
  • Doi Number: 10.1016/j.proeng.2010.09.321
  • City: Linz
  • Country: Austria
  • Page Numbers: pp.1176-1179
  • Keywords: energy harvesting, thermoelectric, electromagnetic, vibration, micro power generation
  • Middle East Technical University Affiliated: Yes


This paper introduces a new cantilever type multi-source energy harvester generating electric power from both ambient heat and vibration. Harvesting energy from vibration was realized by electromagnetic conversion, whereas the energy generation from heat was supplied by making use of Seebeck effect of Cr-Al thermocouples implemented on the microcantilevers. The measured average Seebeck coefficient is 12 mu V/K per thermocouples. A total voltage of 3.3 mV was generated from the thermoelectric part and 13.4 mV from the electromagnetic part of the device. Measured total power from the fabricated chip is 1.91 nW (1.12 nW from vibration, 0.79 nW thermoelectric). (C) 2010 published by Elsevier Ltd.