Ion-matrix sheaths related to targets with grooves

Demokan O.

JOURNAL OF APPLIED PHYSICS, vol.91, no.9, pp.5587-5591, 2002 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 91 Issue: 9
  • Publication Date: 2002
  • Doi Number: 10.1063/1.1465505
  • Journal Name: JOURNAL OF APPLIED PHYSICS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.5587-5591
  • Middle East Technical University Affiliated: No

Abstract

In this work, the ion-matrix sheath near a target with a rectangular groove is studied analytically. A two-dimensional model with a single groove is adopted. The potential and electric-field profiles within the groove are analyzed to provide insight regarding the uniformity and efficiency of ion implantation on its walls. The deviation of the sheath edge from the planar geometry is also illustrated. (C) 2002 American Institute of Physics.