Optimization of Silicon Nitride (SiN X ) Anti-reflective coating (arc) and passivation layers using industrial plasma enhanced chemical vapor deposition (pecvd) for perc type solar cells

Kökbudak G., Orhan E., Es F., Semiz E., Turan R.

2018 International Conference on Photovoltaic Science and Technologies, PVCon 2018, Ankara, Turkey, 4 - 06 July 2018, (Full Text)

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/pvcon.2018.8523918
• City: Ankara
• Country: Turkey
• Open Archive Collection: AVESIS Open Access Collection
• Middle East Technical University Affiliated: Yes