Optimization of Silicon Nitride (SiN X ) Anti-reflective coating (arc) and passivation layers using industrial plasma enhanced chemical vapor deposition (pecvd) for perc type solar cells

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Kökbudak G., Orhan E., Es F. , Semiz E. , Turan R.

2018 International Conference on Photovoltaic Science and Technologies, PVCon 2018, Ankara, Turkey, 4 - 06 July 2018 identifier