Optimization of Silicon Nitride (SiN X ) Anti-reflective coating (arc) and passivation layers using industrial plasma enhanced chemical vapor deposition (pecvd) for perc type solar cells

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Kökbudak G., Orhan E., Es F., Semiz E., Turan R.

2018 International Conference on Photovoltaic Science and Technologies, PVCon 2018, Ankara, Turkey, 4 - 06 July 2018

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/pvcon.2018.8523918
• City: Ankara
• Country: Turkey
• Middle East Technical University Affiliated: Yes