Light trapping is essential for thin film solar cells to decrease the solar electricity cost. Aluminum induced texturing (AIT) is an alternative and effective method for light trapping. Various parameters effects the final surface morphology in AIT. However, surface morphology obtained by AIT method on glass is mostly formed in annealing process which occurs at temperatures above 500 degrees C. In this study, annealing process under N-2 ambient is investigated. A relevant model of evolution is formed. In addition, diffusion of Na during this process is covered. (C) 2016 The Authors. Published by Elsevier Ltd.