A bulk-micromachined fully-differential MEMS accelerometer with interdigitated fingers

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Aydin O., AKIN T.

11th IEEE SENSORS 2012 Conference, Taipei, Taiwan, 28 - 31 October 2012

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/icsens.2012.6411038
• City: Taipei
• Country: Taiwan
• Middle East Technical University Affiliated: Yes