A bulk-micromachined fully-differential MEMS accelerometer with interdigitated fingers

Aydin O., AKIN T.

11th IEEE SENSORS 2012 Conference, Taipei, Taiwan, 28 - 31 October 2012 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/icsens.2012.6411038
  • City: Taipei
  • Country: Taiwan
  • Middle East Technical University Affiliated: Yes