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A bulk-micromachined fully-differential ...
A bulk-micromachined fully-differential MEMS accelerometer with interdigitated fingers
Aydin O.
,
AKIN T.
11th IEEE SENSORS 2012 Conference, Taipei, Taiwan, 28 - 31 October 2012
Publication Type:
Conference Paper / Full Text
Doi Number:
10.1109/icsens.2012.6411038
City:
Taipei
Country:
Taiwan