Critical analysis of matching schemes in capacitively coupled discharges

Demokan O.

IEEE TRANSACTIONS ON PLASMA SCIENCE, vol.31, no.5, pp.1100-1102, 2003 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 31 Issue: 5
  • Publication Date: 2003
  • Doi Number: 10.1109/tps.2003.815480
  • Journal Name: IEEE TRANSACTIONS ON PLASMA SCIENCE
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.1100-1102
  • Middle East Technical University Affiliated: No

Abstract

It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.