Critical analysis of matching schemes in capacitively coupled discharges

Demokan O.

IEEE TRANSACTIONS ON PLASMA SCIENCE, cilt.31, sa.5, ss.1100-1102, 2003 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 31 Sayı: 5
  • Basım Tarihi: 2003
  • Doi Numarası: 10.1109/tps.2003.815480
  • Dergi Adı: IEEE TRANSACTIONS ON PLASMA SCIENCE
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.1100-1102
  • Orta Doğu Teknik Üniversitesi Adresli: Hayır

Özet

It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.