IEEE TRANSACTIONS ON PLASMA SCIENCE, cilt.31, sa.5, ss.1100-1102, 2003 (SCI-Expanded)
It is shown that, in capacitively coupled radio frequency discharges, the amplitude of the discharge current may not have a unique value for a matching network designed to yield the maximum power transfer. The condition, which may lead to this uncertainty, is derived to avoid the possible, undesired mode of operation.