Fabrication of SERS Substrates via Laser Induced Surface Nanostructuring of Silicon

Akbıyık A., Avishan N., YÜCE E., BEK A.

11th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2021, Warszawa, Polonya, 20 - 23 Temmuz 2021, ss.879-883 identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Basıldığı Şehir: Warszawa
  • Basıldığı Ülke: Polonya
  • Sayfa Sayıları: ss.879-883
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

In this work, we fabricate SERS substrates using laser assisted chemical etching as a surface nano structuring technique for crystalline silicon surface. On top of the surface of the etched silicon, silver is thermally deposited to form hot spots with the roughened surface. Silver thickness on top of the structured silicon is shown to influence significantly to the SERS signal obtained from the substrates due to electromagnetic field enhancement, along with the various parameters that affect surface roughness of silicon, such as, illumination power, duration, and solution concentrations.