An energy harvesting MEMS frequency detector

Sari I., Balkan T., KÜLAH H.

6th IEEE Sensors Conference, Georgia, United States Of America, 28 - 31 October 2007, pp.1460-1463 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/icsens.2007.4388689
  • City: Georgia
  • Country: United States Of America
  • Page Numbers: pp.1460-1463
  • Middle East Technical University Affiliated: Yes


This paper presents an energy harvesting electromagnetic MEMS sensor that can detect the frequency of environmental vibrations. The device is composed of a number of serially connected coils that are fabricated on parylene cantilevers in different lengths, and can output the frequency content of ambient vibrations while harvesting electrical energy in a wide band of predetermined frequency range (3.7-4.7 kHz). The sensor generates an output voltage at the ambient vibration frequency by virtue of the relative motion of the cantilevers with respect to a magnet through electromagnetic induction. The induced voltage is processed by readout electronics to extract the frequency information. The sensor also scavenges energy that can be used to increase the life-time of the power supply of the readout electronics.