Copy For Citation
Akin T., Ziaie B., Najafi K.
IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems - An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, California, United States Of America, 11 - 15 February 1996, pp.497-502
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Publication Type:
Conference Paper / Full Text
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Doi Number:
10.1109/memsys.1996.494032
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City:
California
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Country:
United States Of America
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Page Numbers:
pp.497-502
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Middle East Technical University Affiliated:
Yes