Fabrication of SiO2-stacked diamond membranes and their characteristics for microelectromechanical applications

BAYRAM B.

DIAMOND AND RELATED MATERIALS, cilt.20, sa.4, ss.459-463, 2011 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 20 Sayı: 4
  • Basım Tarihi: 2011
  • Doi Numarası: 10.1016/j.diamond.2011.01.047
  • Dergi Adı: DIAMOND AND RELATED MATERIALS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.459-463
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

Diamond is a promising microelectromechanical systems (MEMS) material due to its high Young's Modulus and very large thermal conductivity. In this work, ultrananocrystalline diamond was stacked between silicon dioxide to form thermally-stable and robust membranes. These SiO2-stacked diamond layers were processed into MEMS-compatible membranes. For comparison, membranes composed of only SiO2 were fabricated as well. The structural characteristics of these membranes are compared and analyzed for membranes of different diameters. Using finite element modeling, the experimental behaviors of SiO2 and SiO2-stacked diamond membranes are analyzed. (C) 2011 Elsevier B.V. All rights reserved.