Porous TiO2 films were deposited on glass and ITO coated glass substrates by spin coating for spinning rates of 2000, 5000, 2000 followed by successive run of 5000 rpm (2000-5000). The AFM, SEM, XRD and UV-Vis analysis of the films coated on bare glass substrates for individual and 2000-5000 rpm runs showed amorphous and crystalline behaviours respectively, while TiO2 films deposited on ITO/Glass substrates show crystalline structure. Both substrate nature and thickness of the films influence the formation of the crystallinity of the films. Also AFM images reveal that the roughness values of the films are independent of substrate. (C) 2014 The Authors. Published by Elsevier Ltd.