Poly(methyl methacrylate) (PMMA) is a strong and lightweight material used in wide range of areas changing from lenses to medical and dental devices. In this study, PMMA samples were modified by oxygen, nitrogen and argon plasma with application of 100 watts 13.56 MHz radio frequency (RF) discharge for different periods (5 min, 15 min and 30 min) and the effects of plasma parameters on surface chemistry, hydrophilicity, surface free energy and topography were examined. XPS analysis showed formation of free carbonyl and carbonate groups by oxygen plasma, carboxylic acid and free carbonyl by argon plasma, and imine, primary amine, amide and nitrozo functional groups by nitrogen plasma treatments. For all cases plasma treatment created more hydrophilic surfaces with lower water contact angles than that of pristine PMMA. Also, plasma caused an increase in the surface free energy and its' polar components determined by Geometric Mean, Harmonic Mean, and Acid-Base approaches. AFM results showed increasing roughness parallel to the duration of plasma. As a result, each plasma treatment caused different functionalities and physical topographies on PMMA surfaces and different functionalities can be used for further developments such as binding specific active molecules to design biosensors or medical devices.