Modeling of Microfluidic MEMS-Based Capacitive Pressure Measurement

EROĞLU S., Önsoy A., Öztürk Ç., Çetin B., YILDIRIM E.

15th International Conference on Computational Heat and Mass Transfer, ICCHMT 2025, Antalya, Turkey, 19 - 22 May 2025, vol.29, pp.3-10, (Full Text) identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 29
  • Doi Number: 10.1007/978-3-032-16138-3_1
  • City: Antalya
  • Country: Turkey
  • Page Numbers: pp.3-10
  • Keywords: BioMEMS, capacitive sensing, microfluidics, viscosity measurement
  • Middle East Technical University Affiliated: Yes

Abstract

This study presents analytical and 3D simulation model of MEMS-based capacitive pressure sensor system that is able to sense viscosity change of 0.1 mPa.s. Presented analytical model results that viscosity change of 0.1 mPa.s results in linear capacitance change greater than 1fF and pressure drop change in the order of 102 Pa when subjected to μL/min flow. Analytical model is confirmed with the 3D simulation model of the system using COMSOL Multiphysics’s fluid-structure interaction package. These findings underscore the sensor system’s potential for rapid and precise in vitro diagnostics.