Modeling of Microfluidic MEMS-Based Capacitive Pressure Measurement

EROĞLU S., Önsoy A., Öztürk Ç., Çetin B., YILDIRIM E.

15th International Conference on Computational Heat and Mass Transfer, ICCHMT 2025, Antalya, Türkiye, 19 - 22 Mayıs 2025, cilt.29, ss.3-10, (Tam Metin Bildiri) identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası: 29
  • Doi Numarası: 10.1007/978-3-032-16138-3_1
  • Basıldığı Şehir: Antalya
  • Basıldığı Ülke: Türkiye
  • Sayfa Sayıları: ss.3-10
  • Anahtar Kelimeler: BioMEMS, capacitive sensing, microfluidics, viscosity measurement
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

This study presents analytical and 3D simulation model of MEMS-based capacitive pressure sensor system that is able to sense viscosity change of 0.1 mPa.s. Presented analytical model results that viscosity change of 0.1 mPa.s results in linear capacitance change greater than 1fF and pressure drop change in the order of 102 Pa when subjected to μL/min flow. Analytical model is confirmed with the 3D simulation model of the system using COMSOL Multiphysics’s fluid-structure interaction package. These findings underscore the sensor system’s potential for rapid and precise in vitro diagnostics.