Experimental Heating Analysis of High Frequency RF CCP


ERÖZBEK GÜNGÖR Ü. , BİLİKMEN S. K. , AKBAR D.

Workshop on the Exploration of Low-Temperature Plasma Physics (WELTPP-18), Kerkrade, Netherlands, 3 - 04 December 2015

  • Publication Type: Conference Paper
  • City: Kerkrade
  • Country: Netherlands