Analytical calculation of collapse voltage of CMUT membrane

Nikoozadeh A., BAYRAM B., Yaralioglu G., Khuri-Yakub B.

IEEE Ultrasonics Symposium, Montreal, Canada, 23 - 27 August 2004, pp.256-259 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • City: Montreal
  • Country: Canada
  • Page Numbers: pp.256-259
  • Keywords: capacitive micromachined ultrasonic transducer, CMUT, collapse voltage, MICROMACHINED ULTRASONIC TRANSDUCERS
  • Middle East Technical University Affiliated: No


Because the collapse voltage determines the operating point of the capacitive micromachined ultrasonic transducer (CMUT), it is crucial to calculate and control this parameter. One approach uses parallel plate approximation, where a parallel plate motion models the average membrane displacement. This usually yields calculated collapse voltage 25 percent higher than the actual collapse voltage. More accurate calculation involves finite element method (FEM) analysis. However, depending on the required accuracy, the computation time may require many hours.