Copy For Citation
Akın T.
in: Advanced Micro & Nanosystems Volume 2: CMOS-MEMS, H. Baltes,O. Brand,G.K. Fedder,C. Hierold,J. Kornivk,O. Tabata, Editor, Wiley-VCH Verlag Weinheim GmbH , Berlin, pp.479-512, 2004
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Publication Type:
Book Chapter / Chapter Vocational Book
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Publication Date:
2004
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Publisher:
Wiley-VCH Verlag Weinheim GmbH
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City:
Berlin
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Page Numbers:
pp.479-512
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Editors:
H. Baltes,O. Brand,G.K. Fedder,C. Hierold,J. Kornivk,O. Tabata, Editor
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Middle East Technical University Affiliated:
Yes