Solid Phase Epitaxial Thickening of Phosphorus and Boron Doped Polycrystalline Silicon Seed Layer Formed by Aluminium Induced Crystallization Technique


TÜZÜN ÖZMEN Ö., KARAMAN M., SEDANİ S. H. , TURAN R.

Turkish Physical Society 33rd International Physics Congress, 6 - 10 September 2017

  • Publication Type: Conference Paper / Summary Text
  • Middle East Technical University Affiliated: Yes