Solid Phase Epitaxial Thickening of Phosphorus and Boron Doped Polycrystalline Silicon Seed Layer Formed by Aluminium Induced Crystallization Technique


TÜZÜN ÖZMEN Ö., KARAMAN M., SEDANİ S. H., TURAN R.

Turkish Physical Society 33rd International Physics Congress, 6 - 10 September 2017, (Summary Text)

  • Publication Type: Conference Paper / Summary Text
  • Middle East Technical University Affiliated: Yes