Solid Phase Epitaxial Thickening of Phosphorus and Boron Doped Polycrystalline Silicon Seed Layer Formed by Aluminium Induced Crystallization Technique

TÜZÜN ÖZMEN Ö., KARAMAN M., SEDANİ S. H., TURAN R.

Turkish Physical Society 33rd International Physics Congress, 6 - 10 September 2017

  • Publication Type: Conference Paper / Summary Text
  • Middle East Technical University Affiliated: Yes