A High Performance Hybrid CMOS Microaccelerometer

Salian A., KÜLAH H., Yazdi N., He G., Najafi K.

Solid-State Sensors & Actuators Workshop Hilton Head 2000, 4 - 08 June 2000, pp.202-205, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Page Numbers: pp.202-205
  • Middle East Technical University Affiliated: No