An Optimized Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes

Eminoglu B., Alper S. E., AKIN T.

25th Eurosensors Conference, Athens, Greece, 4 - 07 September 2011, vol.25 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 25
  • Doi Number: 10.1016/j.proeng.2011.12.323
  • City: Athens
  • Country: Greece
  • Middle East Technical University Affiliated: Yes


This paper presents an optimized analytical design procedure for the drive mode analog controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-up is analyzed in detail including the effect of the limited voltage swing of the controller circuitry. As a result, an optimum design procedure is developed for controller design, which is also experimentally verified in a practical implementation demonstrating a settling time of only 50msec without any overshoot, for a gyroscope having a quality factor (Q-factor) of 50,000. The new design procedure makes drive mode settling times almost insensitive to the Q-factor, making it suitable to obtain very-fast-starting MEMS gyroscopes even if they are packaged under high-vacuum. (C) 2011 Published by Elsevier Ltd.