Perturbation analysis of sheath evolution, with application to plasma source ion implantation


Bektursunova R., Demokan O.

JOURNAL OF PHYSICS D-APPLIED PHYSICS, cilt.34, ss.326-329, 2001 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 34 Konu: 3
  • Basım Tarihi: 2001
  • Doi Numarası: 10.1088/0022-3727/34/3/313
  • Dergi Adı: JOURNAL OF PHYSICS D-APPLIED PHYSICS
  • Sayfa Sayıları: ss.326-329

Özet

A perturbation model has been developed to describe the evolution of an expanding plasma sheath around a cathode after a high-voltage negative pulse is applied to the cathode, simulating the conditions in devices such as those used for plasma source ion implantation. The set of governing equations consists of two coupled collisionless fluid equations for ions, and Poisson's equation and Boltzmann's assumption for electrons. The time-dependent, self-consistent expressions for the potential, ion density and ion flux are obtained and compared successfully with experimental and simulation results.