Formation of Al-Si intermetallic phases


Ozenbas M. , Guler H.

CHEMICAL ENGINEERING COMMUNICATIONS, cilt.190, ss.911-924, 2003 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 190
  • Basım Tarihi: 2003
  • Doi Numarası: 10.1080/00986440390207495
  • Dergi Adı: CHEMICAL ENGINEERING COMMUNICATIONS
  • Sayfa Sayıları: ss.911-924

Özet

In this article, a study on the formation of intermetallic compounds at the interface between aluminum thin film and silicon substrate is presented. We studied four systems: Al/Si, Al-(5at%)Fe/Si, Al-(5at%)Cr/Si, and Al-(5at%)Ni/Si. After vacuum deposition of the films, the samples were annealed at different temperatures and time intervals. X-ray, SEM, and EDS analysis showed the sequential formation of several intermetallic phases at the interfaces. Using this data, a model will be given about the formation of the observed intermetallic phases.