Electron Heating Mode Transitions in Nitrogen (13.56 and 40.68) MHz RF-CCPs

ERÖZBEK GÜNGÖR Ü., BİLİKMEN S. K., AKBAR D.

in: Bulletin of the Americal Physical Society, , Editor, The American Physical Society , Honolulu, Hawaii, pp.21-22, 2015

  • Publication Type: Book Chapter / Chapter Research Book
  • Publication Date: 2015
  • Publisher: The American Physical Society
  • City: Honolulu, Hawaii
  • Page Numbers: pp.21-22
  • Editors: , Editor
  • Middle East Technical University Affiliated: Yes