IEEE Ultrasonics Symposium, Vancouver, Canada, 3 - 06 October 2006, pp.590-593
This paper reports on the finite element analysis (FEA) of crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. Finite element calculations using a commercial package (LS-DYNA) were performed for an immersed I-D CMUT array operating in the conventional and collapsed modes. LS-DYNA was used to model the crosstalk in CMUT arrays under specific voltage bias and excitation conditions, and such a modeling is well worth the effort for special-purpose CMUT arrays for ultrasound applications such as medical imaging and high intensity focused ultrasound (HIFU) treatment.