Mikro Elekro Mekanik Sistemler MEMS Üretim Teknikleri

KAPLAN H., DÖLEN M.

11. ULUSAL MAKİNA TEORİSİ SEMPOZYUMU, Ankara, Turkey, 4 - 06 September 2003, vol.2, pp.677-688, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Volume: 2
  • City: Ankara
  • Country: Turkey
  • Page Numbers: pp.677-688
  • Middle East Technical University Affiliated: Yes