Low temperature aluminum doped zinc oxide thin film deposition on ultra-thin flexible glass and PET substrates by RF magnetron sputtering

Demircioglu Z., Ozkol E., Nasser H., TURAN R.

3rd Turkish Solar Electricity Conference and Exhibition (SolarTR), Ankara, Turkey, 27 - 29 April 2015, vol.12, pp.1215-1219 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 12
  • Doi Number: 10.1002/pssc.201510144
  • City: Ankara
  • Country: Turkey
  • Page Numbers: pp.1215-1219
  • Middle East Technical University Affiliated: Yes


Aluminum doped zinc oxide (AZO) thin films are prepared on ultra-thin flexible glass and flexible polyethylene terephthalate (PET) substrates at room temperature by radio frequency (RF) magnetron sputtering. Optimization of films has been achieved by varying process parameters to reach the demands of proper conductive layer for thin silicon solar cell applications. Structural analysis of the films was done by X-ray diffraction spectroscopy. Optical and electrical properties of the films were carried out by means of UV-Visible spectroscopy, and four point probe measurements. Thickness of the films was obtained by spectroscopic ellipsometry. Transmission measurements clearly show that by decreasing pressure transmission of the AZO film is improved in the UV region. Our results show that by varying the deposition parameters, low resistivity films of 1.1x10(-3) Ocm and 1x10(-3) Ocm were obtained on PET and on ultra-thin flexible substrates, respectively. (C) 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim