A single-mass self-resonating closed-loop capacitive MEMS accelerometer

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Kose T., Terzioglu Y., Azgın K. , Akın T.

15th IEEE Sensors Conference, SENSORS 2016, Florida, United States Of America, 30 October - 02 November 2016

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/icsens.2016.7808711
• City: Florida
• Country: United States Of America