Copy For Citation
Kose T., Terzioglu Y., Azgın K., Akın T.
15th IEEE Sensors Conference, SENSORS 2016, Florida, United States Of America, 30 October - 02 November 2016
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Publication Type:
Conference Paper / Full Text
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Doi Number:
10.1109/icsens.2016.7808711
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City:
Florida
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Country:
United States Of America
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Keywords:
Capacitive MEMS accelerometer, resonating mass, self-resonance, capacitive sensing, force feedback, temperature compensation, closed-loop accelerometer
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Middle East Technical University Affiliated:
Yes