A single-mass self-resonating closed-loop capacitive MEMS accelerometer

Kose T., Terzioglu Y., Azgın K. , Akın T.

15th IEEE Sensors Conference, SENSORS 2016, Florida, United States Of America, 30 October - 02 November 2016 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/icsens.2016.7808711
  • City: Florida
  • Country: United States Of America
  • Keywords: Capacitive MEMS accelerometer, resonating mass, self-resonance, capacitive sensing, force feedback, temperature compensation, closed-loop accelerometer