Self-consistent model of thermal and ionization non-equilibrium spherical microwave discharge

Rafatov I., LELEVKIN V.

JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol.38, no.13, pp.2227-2236, 2005 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 38 Issue: 13
  • Publication Date: 2005
  • Doi Number: 10.1088/0022-3727/38/13/022
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.2227-2236
  • Middle East Technical University Affiliated: Yes


A self-consistent model of a spherical microwave discharge is presented. The model takes into account thermal and ionization non-equilibrium of the discharge plasma. We adopt a partial local thermodynamic equilibrium model for the plasma in two-temperature approximation. Numerical experiments are carried out for the discharge in argon at atmospheric pressure. Results are presented for the characteristics of the discharge plasma against the external parameters (the power and frequency of the applied electromagnetic field and the size of the discharge chamber). Presented model results are compared with the results for the ionization equilibrium model of the spherical microwave discharge.