A Planar Gyroscope Using a Standard Surface Micromachining Process

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Alper S. E., Akın T.

The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), Kobenhavn, Denmark, 27 - 30 August 2000, pp.387-390

  • Publication Type: Conference Paper / Full Text
  • City: Kobenhavn
  • Country: Denmark
  • Page Numbers: pp.387-390
  • Middle East Technical University Affiliated: Yes