A Planar Gyroscope Using a Standard Surface Micromachining Process


Creative Commons License

Alper S. E. , Akın T.

The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), Kobenhavn, Denmark, 27 - 30 August 2000, pp.387-390

  • Publication Type: Conference Paper / Full Text
  • City: Kobenhavn
  • Country: Denmark
  • Page Numbers: pp.387-390