Pb(Zr0.52Ti0.48)O-3 films on stainless steel by chemical solution deposition

Ozenbas M., Yildirim A.

EURO CERAMICS VIII, PTS 1-3, pp.1217-1220, 2004 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Volume:
  • Publication Date: 2004
  • Journal Name: EURO CERAMICS VIII, PTS 1-3
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
  • Page Numbers: pp.1217-1220
  • Keywords: PZT, thin films, chemical solution deposition, stainless steel substrate, TITANATE THIN-FILMS
  • Middle East Technical University Affiliated: Yes


The present work describes the preparation of Pb(Zr0.52Ti0.48)O-3 thin films by chemical solution deposition. Lead acetate, zirconium propoxide and titanium isopropoxide were used as starting materials. Substrates used were stainless steel foils of 0.025 mm, thick (AISI 304). The preparation of stock solution and heat treatment procedure was described. Crack-free films were obtained by multilayer coating in which the viscosity of the solution was adjusted such that each layer was approximately 0.2 mum thick. X-ray diffraction (XRD) and scanning electron microscopy (SEM) investigations of the PZT thin films relative to the growth conditions were presented. Optimum heat treatment conditions were determined as 600degreesC and 3 hours to obtain high crystallinity and chemical homogeneity.