Langmuir double probe RF plasma compensation using simulation metho

Azooz A. A., Akbar D. S., Bilikmen S.

Acta Technica CSAV (Ceskoslovensk Akademie Ved), cilt.55, sa.4, ss.357-382, 2010 (Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 55 Sayı: 4
  • Basım Tarihi: 2010
  • Dergi Adı: Acta Technica CSAV (Ceskoslovensk Akademie Ved)
  • Derginin Tarandığı İndeksler: Scopus
  • Sayfa Sayıları: ss.357-382
  • Anahtar Kelimeler: Double probe, Glow discharge, Inductive coupling, RF compensation
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

A possibility of removal of radio-frequency contamination of double Langmuir probe voltage-current characteristics is investigated. Computer simulation of this contaminationindicates that the undistorted characteristics can be obtained by proper software treatment of experimental data, which eliminates the need of using filters or other hardware procedures for radio-frequency compensation purpose. User-friendly MATLABbased software performing such compensation is suggested. Experimental data obtained from double-probe measurements of inductively coupled radio-frequency plasma at several pressures, power levelsand positions are analyzed using this technique. © 2010 Institute of Thermomechanics AS CR.