An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth


Sonmezoglu S., Alper S., Akın T.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29 January - 02 February 2012, pp.523-526 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/memsys.2012.6170231
  • City: Paris
  • Country: France
  • Page Numbers: pp.523-526