An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth

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Sonmezoglu S., Alper S., Akın T.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29 January - 02 February 2012, pp.523-526

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/memsys.2012.6170231
• City: Paris
• Country: France
• Page Numbers: pp.523-526
• Middle East Technical University Affiliated: Yes