Validation of the Particle in Cell Monte Carlo Collision numerical code for the RF discharge simulations

KUŞOĞLU SARIKAYA C., RAFATOV İ. , ÇAKIR S.

The International Middle East Plasma Science (IMEPS), Antalya, Turkey, 23 - 25 April 2014

  • Publication Type: Conference Paper / Summary Text
  • City: Antalya
  • Country: Turkey