An in plane high sensitivity low noise micro g silicon accelerometer

Junseok C., KÜLAH H., Najafi K.

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE, Kyoto, Japan, Japan, 19 - 23 January 2003, pp.466-469

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/memsys.2003.1189787
  • City: Kyoto, Japan
  • Country: Japan
  • Page Numbers: pp.466-469
  • Middle East Technical University Affiliated: No