A RESONANT TUNING FORK FORCE SENSOR WITH UNPRECEDENTED COMBINATION OF RESOLUTION AND RANGE


Azgin K., Ro C., Torrents A., Akin T., Valdevit L.

24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Cancun, Mexico, 23 - 27 January 2011, pp.545-548 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/memsys.2011.5734482
  • City: Cancun
  • Country: Mexico
  • Page Numbers: pp.545-548
  • Middle East Technical University Affiliated: Yes

Abstract

This paper presents a double-ended tuning fork (DETF) force sensor with a resolution of 7nN and a range of 0.12N. The resonator has a scale factor of 216 kHz/N, a Q-factor exceeding 60,000 at 3mTorr ambient pressure and a zero-load resonant frequency of 47.6 kHz. The sensor and the complete readout circuit are fully embedded in a compact 65 mm x 52 mm printed circuit board (PCB). The PCB is mounted on a micro-stage and coupled with an off-the-shelf displacement actuator to realize an economical, versatile and robust micro mechanical test frame with unprecedented combination of force and displacement resolutions and ranges.