A multi step electromechanical converter for micro g capacitive accelerometers


KÜLAH H. , Junseok C., Yazdi N., Najafi K.

2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC., San-Francisco, Costa Rica, 13 February 2003, pp.202-203

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/isscc.2003.1234267
  • City: San-Francisco
  • Country: Costa Rica
  • Page Numbers: pp.202-203