MODE TRANSITIONS IN LOW-PRESSURE NITROGEN RF-CCP AT DIFFERENT FREQUENCIES

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ERÖZBEK GÜNGÖR Ü., Bilikmen S. K.

IEEE International Conference on Plasma Sciences (ICOPS), Belek, Turkey, 24 - 28 May 2015

• Publication Type: Conference Paper / Summary Text
• City: Belek
• Country: Turkey
• Middle East Technical University Affiliated: Yes