MODE TRANSITIONS IN LOW-PRESSURE NITROGEN RF-CCP AT DIFFERENT FREQUENCIES

ERÖZBEK GÜNGÖR Ü., Bilikmen S. K.

IEEE International Conference on Plasma Sciences (ICOPS), Belek, Turkey, 24 - 28 May 2015, (Summary Text)

  • Publication Type: Conference Paper / Summary Text
  • City: Belek
  • Country: Turkey
  • Middle East Technical University Affiliated: Yes