MODE TRANSITIONS IN LOW-PRESSURE NITROGEN RF-CCP AT DIFFERENT FREQUENCIES


ERÖZBEK GÜNGÖR Ü. , Bilikmen S. K.

IEEE International Conference on Plasma Sciences (ICOPS), Belek, Turkey, 24 - 28 May 2015 identifier

  • Publication Type: Conference Paper / Summary Text
  • City: Belek
  • Country: Turkey