Multilayer integrated acoustofluidic device for multistage particle manipulation

Açıkgöz H. N., Atay A., Karaman A., ÖZER M. B., Çetin B.

Journal of Micromechanics and Microengineering, cilt.35, sa.7, 2025 (SCI-Expanded, Scopus) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 35 Sayı: 7
  • Basım Tarihi: 2025
  • Doi Numarası: 10.1088/1361-6439/ade889
  • Dergi Adı: Journal of Micromechanics and Microengineering
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Communication Abstracts, Compendex, INSPEC, Metadex, Civil Engineering Abstracts
  • Anahtar Kelimeler: acoustofluidics, enrichment, integrated device, particle separation
  • Orta Doğu Teknik Üniversitesi Adresli: Evet

Özet

In this study, we present a multilayer integrated acoustofluidic device for multistage microparticle manipulation, which combines acoustic size-based separation and enrichment within a compact architecture. The device is composed of two layers, each equipped with independent piezoelectric actuators operating at distinct resonance frequencies. The top layer enables the separation of 2 µm and 12 µm fluorescent particles, while the bottom layer enhances the concentration of 2 µm particles. A thin polymer layer is used to acoustically isolate the units, allowing concurrent manipulation without any acoustic interference. The performance of the isolated units as well as the integrated device was experimentally assessed under varying flow conditions, demonstrating high-efficiency separation and tunable enrichment ratios. This multilayer platform provides a scalable and efficient solution for complex bioanalytical applications requiring sequential acoustofluidic operations in a miniaturized format.