Investigation of warpage behavior of single crystal silicon on a silicon Adhesive ceramic integrated structure at cryogenic temperatures


BALOĞLU C., OKUTUCU ÖZYURT H. T., DURSUNKAYA Z.

IMAPS 12th International Conference and Exhibition on Device Packaging, Fountain Hills, United States Of America, 14 - 17 March 2016, (Full Text) identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: Fountain Hills
  • Country: United States Of America
  • Middle East Technical University Affiliated: Yes