A wide-bandwidth and high-sensitivity robust microgyroscope


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Sahin K., Sahin E., Alper S. E. , Akin T.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, cilt.19, 2009 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 19 Konu: 7
  • Basım Tarihi: 2009
  • Doi Numarası: 10.1088/0960-1317/19/7/074004
  • Dergi Adı: JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Özet

This paper reports a microgyroscope design concept with the help of a 2 degrees of freedom (DoF) sense mode to achieve a wide bandwidth without sacrificing mechanical and electronic sensitivity and to obtain robust operation against variations under ambient conditions. The design concept is demonstrated with a tuning fork microgyroscope fabricated with an in-house silicon-on-glass micromachining process. When the fabricated gyroscope is operated with a relatively wide bandwidth of 1 kHz, measurements show a relatively high raw mechanical sensitivity of 131 mu V (degrees s(-1))(-1). The variation in the amplified mechanical sensitivity (scale factor) of the gyroscope is measured to be less than 0.38% for large ambient pressure variations such as from 40 to 500 mTorr. The bias instability and angle random walk of the gyroscope are measured to be 131 degrees h(-1) and 1.15 degrees h(-1/2), respectively.