A laterally resonating gravimetric sensor with uniform mass sensitivity and high linearity

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Eroglu D., Bayraktar E., KÜLAH H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5 - 09 June 2011, pp.2255-2258

• Publication Type: Conference Paper / Full Text
• Volume:
• Doi Number: 10.1109/transducers.2011.5969332
• City: Beijing
• Country: China
• Page Numbers: pp.2255-2258