A laterally resonating gravimetric sensor with uniform mass sensitivity and high linearity

Eroglu D., Bayraktar E., KÜLAH H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5 - 09 June 2011, pp.2255-2258, (Full Text) identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • Doi Number: 10.1109/transducers.2011.5969332
  • City: Beijing
  • Country: China
  • Page Numbers: pp.2255-2258
  • Middle East Technical University Affiliated: Yes