A multi-step electromechanical Sigma Delta converter for micro-g capacitive accelerometers

KÜLAH H., Chae J., Yazdi N., Najafi K.

IEEE International Solid-State Circuits Conference, San-Francisco, Costa Rica, 9 - 13 February 2003, vol.46, pp.202-204, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Volume: 46
  • City: San-Francisco
  • Country: Costa Rica
  • Page Numbers: pp.202-204
  • Middle East Technical University Affiliated: No