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A symmetric surface micromachined gyrosc...
A symmetric surface micromachined gyroscope with decoupled oscillation modes
Alper S. E.
,
AKIN T.
Transducers'01 Eurosensors XV, Munich, Germany, 10 - 14 June 2001, pp.347-358
Publication Type:
Conference Paper / Full Text
Doi Number:
10.1016/s0924-4247(01)00860-3
City:
Munich
Country:
Germany
Page Numbers:
pp.347-358