A symmetric surface micromachined gyroscope with decoupled oscillation modes

Alper S. E., AKIN T.

Transducers'01 Eurosensors XV, Munich, Germany, 10 - 14 June 2001, pp.347-358, (Full Text)

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1016/s0924-4247(01)00860-3
• City: Munich
• Country: Germany
• Page Numbers: pp.347-358
• Open Archive Collection: AVESIS Open Access Collection
• Middle East Technical University Affiliated: Yes