A symmetric surface micromachined gyroscope with decoupled oscillation modes

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Alper S. E., AKIN T.

Transducers'01 Eurosensors XV, Munich, Germany, 10 - 14 June 2001, pp.347-358

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1016/s0924-4247(01)00860-3
• City: Munich
• Country: Germany
• Page Numbers: pp.347-358
• Middle East Technical University Affiliated: Yes